ARCNL-Advanced Research Center for Nanolithography

Artist impression of ARCNL

The Advanced Research Center for Nanolithography (ARCNL) is a public-private partnership between the Netherlands Organisation for Scientific Research (NWO), the University of Amsterdam (UvA), the VU University Amsterdam (VU) and the semiconductor equipment manufacturer ASML. ARCNL focuses on the fundamental physics involved in current and future key technologies in nanolithography, primarily for the semiconductor industry. The research program of ARCNL has a strong emphasis on the physics involved in the generation of high intensities of EUV light, optical elements for EUV light, EUV photo-chemistry, and a variety of future technologies and associated phenomena. ARCNL is located in the state-of-the-art Matrix VII building, which was officially opened on March 21st, 2019

More information about ARCNL:


Science Park 106
1098 XG Amsterdam
+31 20 7547 100
Website ARCNL