ARCNL-Advanced Research Center for Nanolithography
The Advanced Research Center for Nanolithography (ARCNL) is a public-private partnership between the Netherlands Organisation for Scientific Research (NWO), the University of Amsterdam (UvA), the VU University Amsterdam (VU) and the semiconductor equipment manufacturer ASML. ARCNL focuses on the fundamental physics involved in current and future key technologies in nanolithography, primarily for the semiconductor industry. The research program of ARCNL has a strong emphasis on the physics involved in the generation of high intensities of EUV light, optical elements for EUV light, EUV photo-chemistry, and a variety of future technologies and associated phenomena. ARCNL is managed by the Netherlands Foundation of Scientific Research Institutes, which is part of NWO.